Cross Sections

Electron-argon collisions are a key part of magnetron sputtering and the book devotes considerable space on this topic.  In order to simulate these collisions, you need the scattering cross sections for the basic types of collisions: elastic, excitation and ionization collisions.  A table of these cross sections is provided in the book.  An easier path is to download the cross section file below and import that into Mathematica.  

The cross section file is a text file, in CSV (comma separated values) format.  Thus it can be read by any text editor, spreadsheet program, or math software.  The cross sections in the file have been adapted from the work of Hayashi.

Cross section file: ArCrossSections.csv (2 KB)

© Jack McInerney 2014