Book Excerpt



Chapter 4.  Electron Motion 

In this chapter the knowledge gained in the previous two chapters (on magnetic and electric fields) is used to solve the equations of motion for an electron in a PVD sputtering system.  We find that the electron traces out a complex motion above the target surface.

The links below can be used to read this chapter.  The HTML version is easier to access (smaller file), but the formatting is poor and the equations are bit mapped.  The PDF version has the same formatting and resolution as the book.

HTML version

PDF version (6.6 MB)

© Jack McInerney 2014